Mass Flow
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter High-grade Mass Flow controller Standard Mass Flow meter Small Karman vortex flow meter for liquids
3440 SERIES 3300 SERIES 3660 SERIES 3200 SERIES 3660NV SERIES Small Karman vortex flow meter for liquids
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter Compact metal seal Mass Flowmeter Standard Mass Flowmeter Small Karman vortex flow meter for liquids
3810S SERIES 5400 SERIES 8100 SERIES REEDOUT_UNIT CR500

Metal Seal Mass Flow Controller or Mass Flow Meter
MODEL 3440 and 3340 SERIES
 
The model 3440 series device is a Mass Flow controller that has basic features such as weld-less structure, metal seal, accuracy of ¡¾1%, and response of 1 second required for semiconductor process control and that has implemented significant price reduction. The Mass Flow meter model 3340 series of the same body design are also lined up.

Features
Implementation of high accuracy and fast response with a flow sensor of temperature follow-up type current difference detection method (patent pending)
Solenoid normally-colsed valve
Weld-less construction and metal seal realizes low leak
Reduced dead volume thanks to the diaphragm seat valve
Body dimension and harness layout is so constructed that it is compatible with other manufacturer's controller
Low-cost Metal Seal Mass Flow Controller or Mass Flow Meter
Standard specifications
Flow range
(on N2 conversion basis) 		F.S. 10 to 500 SCCM, 1 to 5 SLM
F.S. 10 to 20 SLM
Valve method* Normally-closed, solenoid, diaphragm seat valve
Control range* 2 to 100%F.S.
Response * accuracy 0 to 100% response, 1 second or less (Set Point ¡¾2% typical or less)
1 second or less from 0 to 100% and from 0 to 20% when the QS option is applied)
Linearity Within ¡¾1.0%F.S.
Repeatability Within ¡¾0.5%F.S.
Operating differential pressure Within ¡¾0.2%F.S.
Pressure resistance F.S ¡Â 5 SLM 49 to 294 kPa
Leak rate 980 kPa
Operating temperature 1 ¡¿ 10 -11 Pam 3 /second or less
Gas contact materials Body: SUS316L
Diaphragm: Ni-Co
Valve seat: PTFE
Seal materials: Ni and SUS316L

Joint

1/4VCR or equivalent
Electrical connection* Dsub 9-pin, male KFC standard (conforming to SEMI standard)
Flow setting input signal 0 to 5 VDC
Flow output signal 0 to 5 VDC
Power supply required 3440: +15 VDC (¡¾5%) 100mA,?15VDC(¡¾5%)200mA
3340: +15 VDC (¡¾5%) 100mA,?15VDC(¡¾5%)100mA
Items marked with * are applied only to Mass Flow controller model 3440.